Pierluigi Frisco, Timo Bootsma, Thomas Bäck. Multi-objective genetic algorithms for reducing mark read-out effort in lithographic tests. In Manuel López-Ibáñez 0001, Anne Auger, Thomas Stützle, editors, Proceedings of the Genetic and Evolutionary Computation Conference Companion, GECCO 2019, Prague, Czech Republic, July 13-17, 2019. pages 365-366, ACM, 2019. [doi]
@inproceedings{FriscoBB19,
title = {Multi-objective genetic algorithms for reducing mark read-out effort in lithographic tests},
author = {Pierluigi Frisco and Timo Bootsma and Thomas Bäck},
year = {2019},
doi = {10.1145/3319619.3321931},
url = {https://doi.org/10.1145/3319619.3321931},
researchr = {https://researchr.org/publication/FriscoBB19},
cites = {0},
citedby = {0},
pages = {365-366},
booktitle = {Proceedings of the Genetic and Evolutionary Computation Conference Companion, GECCO 2019, Prague, Czech Republic, July 13-17, 2019},
editor = {Manuel López-Ibáñez 0001 and Anne Auger and Thomas Stützle},
publisher = {ACM},
isbn = {978-1-4503-6748-6},
}