Pierluigi Frisco, Timo Bootsma, Thomas Bäck. Multi-objective genetic algorithms for reducing mark read-out effort in lithographic tests. In Manuel López-Ibáñez 0001, Anne Auger, Thomas Stützle, editors, Proceedings of the Genetic and Evolutionary Computation Conference Companion, GECCO 2019, Prague, Czech Republic, July 13-17, 2019. pages 365-366, ACM, 2019. [doi]
Abstract is missing.