Xuewei Fu, Xiaofeng Yang, Pericle Zanchetta, Yang Liu 0075, Chenyang Ding, Mi Tang, Zhenyu Chen 0005. Frequency-Domain Data-Driven Adaptive Iterative Learning Control Approach: With Application to Wafer Stage. IEEE Transactions on Industrial Electronics, 68(10):9309-9318, 2021. [doi]
Abstract is missing.