Properties of transparent conductive ZnO: Al thin films prepared by magnetron sputtering

En-Gang Fu, Da-Ming Zhuang, Gong Zhang, Zhao Ming, Wei-Fang Yang, Jia-Jun Liu. Properties of transparent conductive ZnO: Al thin films prepared by magnetron sputtering. Microelectronics Journal, 35(4):383-387, 2004. [doi]

@article{FuZZmYL04,
  title = {Properties of transparent conductive ZnO: Al thin films prepared by magnetron sputtering},
  author = {En-Gang Fu and Da-Ming Zhuang and Gong Zhang and Zhao Ming and Wei-Fang Yang and Jia-Jun Liu},
  year = {2004},
  doi = {10.1016/S0026-2692(03)00251-9},
  url = {http://dx.doi.org/10.1016/S0026-2692(03)00251-9},
  researchr = {https://researchr.org/publication/FuZZmYL04},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Journal},
  volume = {35},
  number = {4},
  pages = {383-387},
}