Utilizing Lateral Plate Transducer Modes for High Quality Acoustofluidics in Silicon-Based Chips

Andreas Fuchsluger, Annalisa De Pastina, Norbert Cselyuszka, Nikolai Andrianov, Ali Roshanghias, Tina Mitteramskogler, Rafael Ecker, Thomas Voglhuber-Brunnmaier, Mohssen Moridi, Bernhard Jakoby. Utilizing Lateral Plate Transducer Modes for High Quality Acoustofluidics in Silicon-Based Chips. In 2022 IEEE Sensors, Dallas, TX, USA, October 30 - Nov. 2, 2022. pages 1-4, IEEE, 2022. [doi]

Abstract

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