Martin E. Fuerst, Nikolaus Berlakovich, Ernst Csencsics, Georg Schitter. Self-Aligning Scanning Shack-Hartmann Sensor for Automatic Wavefront Measurements of High-NA Optics. In 2020 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2020, Dubrovnik, Croatia, May 25-28, 2020. pages 1-6, IEEE, 2020. [doi]
Abstract is missing.