Investigating Stability of Si Sphere Surface Layer in Ambient-Vacuum Cyclic Measurements Using Ellipsometry

Kazuaki Fujita, Kenichi Fujii, Lulu Zhang, Yasushi Azuma, Shigeki Mizushima, Naoki Kuramoto. Investigating Stability of Si Sphere Surface Layer in Ambient-Vacuum Cyclic Measurements Using Ellipsometry. IEEE T. Instrumentation and Measurement, 71:1-9, 2022. [doi]

Abstract

Abstract is missing.