Kaigham J. Gabriel. Microelectromechanical systems. Proceedings of the IEEE, 86(8):1534-1535, 1998. [doi]
@article{Gabriel98-1, title = {Microelectromechanical systems}, author = {Kaigham J. Gabriel}, year = {1998}, doi = {10.1109/5.704257}, url = {https://doi.org/10.1109/5.704257}, researchr = {https://researchr.org/publication/Gabriel98-1}, cites = {0}, citedby = {0}, journal = {Proceedings of the IEEE}, volume = {86}, number = {8}, pages = {1534-1535}, }