Polysilicon oxide quality optimization at Wafer level of a Bipolar/CMOS/DMOS technology

Xavier Gagnard, Yannick Rey-Tauriac, Olivier Bonnaud. Polysilicon oxide quality optimization at Wafer level of a Bipolar/CMOS/DMOS technology. Microelectronics Reliability, 41(9-10):1335-1340, 2001.

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