An absolute angle recovery method for dual-interferometer-based rotational stages

Pablo Serrano Galvez, Mark Butcher, Alessandro Masi. An absolute angle recovery method for dual-interferometer-based rotational stages. In IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2017, Torino, Italy, May 22-25, 2017. pages 1-6, IEEE, 2017. [doi]

Authors

Pablo Serrano Galvez

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Mark Butcher

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Alessandro Masi

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