Copper interconnect technology for the 32 nm node and beyond

Jeff Gambino, Fen Chen, John He. Copper interconnect technology for the 32 nm node and beyond. In IEEE Custom Integrated Circuits Conference, CICC 2009, San Jose, California, USA, 13-16 September, 2009, Proceedings. pages 141-148, IEEE, 2009. [doi]

Abstract

Abstract is missing.