Bi-objective schedule control of batch processes in semiconductor manufacturing - researchr publication authors

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Viswanath Kumar Ganesan, Amit Kumar Gupta, Appa Iyer Sivakumar. Bi-objective schedule control of batch processes in semiconductor manufacturing. In 2004 IEEE Conference on Robotics, Automation and Mechatronics, RAM 2004, December 1-3, 2004, Singapore. pages 1077-1082, IEEE, 2004. [doi]

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