Bi-objective schedule control of batch processes in semiconductor manufacturing

Viswanath Kumar Ganesan, Amit Kumar Gupta, Appa Iyer Sivakumar. Bi-objective schedule control of batch processes in semiconductor manufacturing. In 2004 IEEE Conference on Robotics, Automation and Mechatronics, RAM 2004, December 1-3, 2004, Singapore. pages 1077-1082, IEEE, 2004. [doi]

@inproceedings{GanesanGS04,
  title = {Bi-objective schedule control of batch processes in semiconductor manufacturing},
  author = {Viswanath Kumar Ganesan and Amit Kumar Gupta and Appa Iyer Sivakumar},
  year = {2004},
  url = {http://ieeexplore.ieee.org/xpls/abs_all.jsp?isnumber=30961&arnumber=1438069&count=104&index=81},
  researchr = {https://researchr.org/publication/GanesanGS04},
  cites = {0},
  citedby = {0},
  pages = {1077-1082},
  booktitle = {2004 IEEE Conference on Robotics, Automation and Mechatronics, RAM 2004, December 1-3, 2004, Singapore},
  publisher = {IEEE},
}