Design of Digital Demodulation Circuit for Closed Loop Control of Resonant MEMS Gyroscopes

Zhenyi Gao, Bin Zhou, Yang Li, Qi Wei 0001, Rong Zhang 0005. Design of Digital Demodulation Circuit for Closed Loop Control of Resonant MEMS Gyroscopes. In 2019 IEEE SENSORS, Montreal, QC, Canada, October 27-30, 2019. pages 1-4, IEEE, 2019. [doi]

Abstract

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