Kai Gao, Qiyuan Zhang, Weiguo Su, Wei Zhang. Patterned Al-Ge Wafer Bonding for Reducing In-Process Side Leakage of Eutectic. In 13th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018, Singapore, Singapore, April 22-26, 2018. pages 332-335, IEEE, 2018. [doi]
Abstract is missing.