Effect of the Detector Width and Gas Pressure on the Frequency Response of a Micromachined Thermal Accelerometer

Alexandra Garraud, Philippe Combette, Johann Courteaud, Alain Giani. Effect of the Detector Width and Gas Pressure on the Frequency Response of a Micromachined Thermal Accelerometer. Micromachines, 2(2):167-178, 2011. [doi]

Abstract

Abstract is missing.