Stefan Gassmann, Antonio Luque, Francisco Perdigones, José M. Quero, Lienhard Pagel. Sensor structures generated with combination of SU8 and PCBMEMS. In IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society, Vienna, Austria, November 10-13, 2013. pages 108-112, IEEE, 2013. [doi]
Abstract is missing.