Anodically Bonded Photoacoustic Transducer: An Approach towards Wafer-Level Optical Gas Sensors

Simon Gassner, Rainer Schaller, Matthias Eberl, Carsten von Koblinski, Simon Essing, Mohammadamir Ghaderi, Katrin Schmitt, Jürgen Wöllenstein. Anodically Bonded Photoacoustic Transducer: An Approach towards Wafer-Level Optical Gas Sensors. Sensors, 22(2):685, 2022. [doi]

@article{GassnerSEKEGSW22,
  title = {Anodically Bonded Photoacoustic Transducer: An Approach towards Wafer-Level Optical Gas Sensors},
  author = {Simon Gassner and Rainer Schaller and Matthias Eberl and Carsten von Koblinski and Simon Essing and Mohammadamir Ghaderi and Katrin Schmitt and Jürgen Wöllenstein},
  year = {2022},
  doi = {10.3390/s22020685},
  url = {https://doi.org/10.3390/s22020685},
  researchr = {https://researchr.org/publication/GassnerSEKEGSW22},
  cites = {0},
  citedby = {0},
  journal = {Sensors},
  volume = {22},
  number = {2},
  pages = {685},
}