Simon Gassner, Rainer Schaller, Matthias Eberl, Carsten von Koblinski, Simon Essing, Mohammadamir Ghaderi, Katrin Schmitt, Jürgen Wöllenstein. Anodically Bonded Photoacoustic Transducer: An Approach towards Wafer-Level Optical Gas Sensors. Sensors, 22(2):685, 2022. [doi]
Abstract is missing.