Fast self-resonant startup procedure for digital MEMS gyroscope system

Fei Ge, Dachuan Liu, Longtao Lin, Zhenchuan Yang, Guizhen Yan. Fast self-resonant startup procedure for digital MEMS gyroscope system. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 669-672, IEEE, 2012. [doi]

Abstract

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