Design and Optimization Methodology of Coplanar Waveguide Test Structures for Dielectric Characterization of Thin Films

Jinqun Ge, Tian Xia, Guoan Wang. Design and Optimization Methodology of Coplanar Waveguide Test Structures for Dielectric Characterization of Thin Films. J. Electronic Testing, 36(2):183-188, 2020. [doi]

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