Zhenya Geng, Yi Shen 0001, Miao Zhang, Muhua Li, Jing Jin. Resonant frequency analysis for spring-mass structure in high-g MEMS accelerometer. In IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2013, Minneapolis, MN, USA, May 6-9, 2013. pages 440-443, IEEE, 2013. [doi]
Abstract is missing.