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Sensitivity Voltage Analysis for Piezoelectric MEMS Gyroscope using Aluminum Nitride (AlN), Zinc Oxide (ZnO) and Barium titanate (BaTiO3)

Sherif A. Ghamry, Ahmed K. Mahmoud, Roshdy A. AbdelRassoul, Iman G. Morsi. Sensitivity Voltage Analysis for Piezoelectric MEMS Gyroscope using Aluminum Nitride (AlN), Zinc Oxide (ZnO) and Barium titanate (BaTiO3). In 32nd International Conference on Computer Theory and Applications, ICCTA 2022, Alexandria, Egypt, December 17-19, 2022. pages 196-199, IEEE, 2022. [doi]

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