Motion Measurement Methods for Nonlinear Analysis of Electrostatic MEMS Resonators

Mehdi Ghommem, Basil Alattar, Michael Lherbette, Alaaeldin Elhady, Eihab M. Abdel-Rahman. Motion Measurement Methods for Nonlinear Analysis of Electrostatic MEMS Resonators. In 20th IEEE International Conference on Smart Technologies, EUROCON 2023, Torino, Italy, July 6-8, 2023. pages 632-637, IEEE, 2023. [doi]

@inproceedings{GhommemALEA23,
  title = {Motion Measurement Methods for Nonlinear Analysis of Electrostatic MEMS Resonators},
  author = {Mehdi Ghommem and Basil Alattar and Michael Lherbette and Alaaeldin Elhady and Eihab M. Abdel-Rahman},
  year = {2023},
  doi = {10.1109/EUROCON56442.2023.10199044},
  url = {https://doi.org/10.1109/EUROCON56442.2023.10199044},
  researchr = {https://researchr.org/publication/GhommemALEA23},
  cites = {0},
  citedby = {0},
  pages = {632-637},
  booktitle = {20th IEEE International Conference on Smart Technologies, EUROCON 2023, Torino, Italy, July 6-8, 2023},
  publisher = {IEEE},
  isbn = {978-1-6654-6397-3},
}