Mehdi Ghommem, Basil Alattar, Michael Lherbette, Alaaeldin Elhady, Eihab M. Abdel-Rahman. Motion Measurement Methods for Nonlinear Analysis of Electrostatic MEMS Resonators. In 20th IEEE International Conference on Smart Technologies, EUROCON 2023, Torino, Italy, July 6-8, 2023. pages 632-637, IEEE, 2023. [doi]
Abstract is missing.