Sagnik Ghosh, Joshua E.-Y. Lee. Lorentz Force Magnetic Sensors Based on Piezoelectric Aluminum Nitride on Silicon Micromechanical Resonators. In 13th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018, Singapore, Singapore, April 22-26, 2018. pages 288-291, IEEE, 2018. [doi]
Abstract is missing.