Laser Polarimetric Imaging of Surface Defects of Semiconductor Wafers, Microelectronics, and Spacecraft Structures

George C. Giakos, A. Medithe, S. Sumrain, Srinivas Sukumar, Luay Fraiwan, A. Orozco. Laser Polarimetric Imaging of Surface Defects of Semiconductor Wafers, Microelectronics, and Spacecraft Structures. IEEE T. Instrumentation and Measurement, 55(6):2126-2131, 2006. [doi]

Abstract

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