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Contactless RF MEMS switch using PZT actuation

Tim Giffney, Miao Yu, Kean C. Aw, Haixia Zhang. Contactless RF MEMS switch using PZT actuation. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 861-864, IEEE, 2013. [doi]

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