Fault isolation in a case study of failure analysis on Metal-Insulator-Metal capacitor structures

V. Giuffrida, P. Barbarino, Giuseppe Muni, G. Calvagno, G. Latteo, Domenico Mello. Fault isolation in a case study of failure analysis on Metal-Insulator-Metal capacitor structures. Microelectronics Reliability, 55(9-10):1640-1643, 2015. [doi]

Abstract

Abstract is missing.