Performance improvement of Si-CCD detector based backside reflected light and photon emission microscopy by FIB ultimate substrate thinning

Arkadiusz Glowacki, Christian Boit, Philippe Perdu. Performance improvement of Si-CCD detector based backside reflected light and photon emission microscopy by FIB ultimate substrate thinning. Microelectronics Reliability, 51(9-11):1632-1636, 2011. [doi]

Abstract

Abstract is missing.