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Backside spectroscopic photon emission microscopy using intensified silicon CCD

Arkadiusz Glowacki, Christian Boit, Philippe Perdu, Yoshitaka Iwaki. Backside spectroscopic photon emission microscopy using intensified silicon CCD. Microelectronics Reliability, 54(9-10):2105-2108, 2014. [doi]

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Arkadiusz Glowacki

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Christian Boit

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Philippe Perdu

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Yoshitaka Iwaki

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