Backside spectroscopic photon emission microscopy using intensified silicon CCD

Arkadiusz Glowacki, Christian Boit, Philippe Perdu, Yoshitaka Iwaki. Backside spectroscopic photon emission microscopy using intensified silicon CCD. Microelectronics Reliability, 54(9-10):2105-2108, 2014. [doi]

Abstract

Abstract is missing.