Matthias Goldsche, Tymofiy Khodkov, Pascal Kaienburg, Christoph Neumann, Christoph Stampfer, Stefan Trellenkamp, Gregor Mussler. Low-temperature compatible electrostatic comb-drive actuators with integrated graphene. In 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014. pages 251-255, IEEE, 2014. [doi]
@inproceedings{GoldscheKKNSGTM14,
title = {Low-temperature compatible electrostatic comb-drive actuators with integrated graphene},
author = {Matthias Goldsche and Tymofiy Khodkov and Pascal Kaienburg and Christoph Neumann and Christoph Stampfer and Stefan Trellenkamp and Gregor Mussler},
year = {2014},
doi = {10.1109/NEMS.2014.6908802},
url = {https://doi.org/10.1109/NEMS.2014.6908802},
researchr = {https://researchr.org/publication/GoldscheKKNSGTM14},
cites = {0},
citedby = {0},
pages = {251-255},
booktitle = {9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014},
publisher = {IEEE},
isbn = {978-1-4799-4726-3},
}