Matthias Goldsche, Tymofiy Khodkov, Pascal Kaienburg, Christoph Neumann, Christoph Stampfer, Stefan Trellenkamp, Gregor Mussler. Low-temperature compatible electrostatic comb-drive actuators with integrated graphene. In 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014. pages 251-255, IEEE, 2014. [doi]
Abstract is missing.