Lithium niobate MEMS devices and subsystems for radio frequency signal processing

Songbin Gong, Yong-Ha Song, Tomas Manzaneque, Ruochen Lu, Yansong Yang, Ali Kourani. Lithium niobate MEMS devices and subsystems for radio frequency signal processing. In IEEE 60th International Midwest Symposium on Circuits and Systems, MWSCAS 2017, Boston, MA, USA, August 6-9, 2017. pages 45-48, IEEE, 2017. [doi]

Abstract

Abstract is missing.