Somu Goswami, Christian Bretthauer, Andreas Bogner, Abhiraj Basavanna, Sebastian Anzinger, Marco Haubold, Gunar Lorenz, Johann Strasser, Daniel Weber, Lorenzo Servadei, Robert Wille. Compact High-Performance Vibration Sensor Based on Single-Backplate MEMS Technology. In 2022 IEEE Sensors, Dallas, TX, USA, October 30 - Nov. 2, 2022. pages 1-4, IEEE, 2022. [doi]
Abstract is missing.