Nirmal Govind, David Fronckowiak. Process equipment modeling: resident-entity based simulation of batch chamber tools in 300mm semiconductor manufacturing. In Stephen E. Chick, Paul J. Sanchez, David M. Ferrin, Douglas J. Morrice, editors, Proceedings of the 35th Winter Simulation Conference: Driving Innovation, New Orleans, Louisiana, USA, December 7-10, 2003. pages 1398-1405, ACM, 2003. [doi]
Abstract is missing.