Researchr is a web site for finding, collecting, sharing, and reviewing scientific publications, for researchers by researchers.
Sign up for an account to create a profile with publication list, tag and review your related work, and share bibliographies with your co-authors.
I. Grimberg, H. Coulson, K. Williamson, J. Pohl, Z. Shafrir, E. Raz. A Novel Automatic Polishing Technique for Micro-Controllers with 45° off Si <100> Rotation. Microelectronics Reliability, 44(9-11):1611-1614, 2004. [doi]
Abstract is missing.