Laterally-excited bulk-wave resonators (XBARs) with embedded electrodes in 149.5° Z-cut LiNbO3

Xiyu Gu, Jieyu Liu, Yao Cai, Yan Liu, Chao Gao, Zhiwei Wen, Shishang Guo, Chengliang Sun. Laterally-excited bulk-wave resonators (XBARs) with embedded electrodes in 149.5° Z-cut LiNbO3. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 931-934, IEEE, 2021. [doi]

Abstract

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