An wide-range tunable on-chip radio-frequency LC-tank formed with a post-CMOS-compatible MEMS fabrication technique

Lei Gu, Zhengzheng Wu, Xinxin Li. An wide-range tunable on-chip radio-frequency LC-tank formed with a post-CMOS-compatible MEMS fabrication technique. Microelectronics Journal, 40(1):131-136, 2009. [doi]

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