Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect

Yanwei Guan, Shiqiao Gao, Haipeng Liu, Lei Jin, Yaping Zhang. Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect. Sensors, 16(7):1146, 2016. [doi]

Abstract

Abstract is missing.