A temperature control system used for improving resonant frequency drift of MEMS gyroscopes

Rui Guan, Chunhua He, Dachuan Liu, Qiancheng Zhao, Zhenchuan Yang, Guizhen Yan. A temperature control system used for improving resonant frequency drift of MEMS gyroscopes. In 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Xi'an, China, April 7-11, 2015. pages 397-400, IEEE, 2015. [doi]

Abstract

Abstract is missing.