A 36% Scandium Aluminum Nitride pMUT - FBAR Dual Mode Pressure Sensor for IoT Applications

Walter Gubinelli, Luca Colombo, Bernard Herrera Soukup, Pietro Simeoni, Blair Kopp, Alberto Corigliano, Cristian Cassella, Matteo Rinaldi. A 36% Scandium Aluminum Nitride pMUT - FBAR Dual Mode Pressure Sensor for IoT Applications. In 2023 IEEE SENSORS, Vienna, Austria, October 29 - Nov. 1, 2023. pages 1-4, IEEE, 2023. [doi]

Abstract

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