Piezoelectric soft MEMS for tactile sensing and energy harvesting

Francesco Guido, Vincenzo Mariano Mastronardi, Maria Teresa Todaro, Simona Petroni, Massimo de Vittorio. Piezoelectric soft MEMS for tactile sensing and energy harvesting. In 2014 IEEE International Conference on IC Design & Technology, ICICDT 2014, Austin, TX, USA, May 28-30, 2014. pages 1-4, IEEE, 2014. [doi]

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