Design of a High Sensitivity Pirani Gauge Based on Vanadium Oxide Film for High Vacuum Measurement

Song Guo, Liuhaodong Feng, Shuo Chen, Yucheng Ji, Xinlin Peng, Yang Xu, Yong Yin, Shinan Wang. Design of a High Sensitivity Pirani Gauge Based on Vanadium Oxide Film for High Vacuum Measurement. Sensors, 22(23):9275, 2022. [doi]

Abstract

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