Xin Guo, Rahman Hebibul, Zhuangde Jiang, Libo Zhao, Tingzhong Xu, Zhiming Zhao, Zhikang Li, Yu Xu, Wendi Gao. A novel piezoresistive sensitive structure for micromachined high-pressure sensors. In 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, CA, USA, April 9-12, 2017. pages 728-731, IEEE, 2017. [doi]
Abstract is missing.