Amit Kumar Gupta, Peter Lendermann, Appa Iyer Sivakumar, John Priyadi. Simulation analysis of cluster tool operations in wafer fabrication. In Scott J. Mason, Raymond R. Hill, Lars Mönch, Oliver Rose, Thomas Jefferson, John W. Fowler, editors, Proceedings of the 2008 Winter Simulation Conference, Global Gateway to Discovery, WSC 2008, InterContinental Hotel, Miami, Florida, USA, December 7-10, 2008. pages 2141-2147, WSC, 2008. [doi]
Abstract is missing.