Melt depth and time variations during pulsed laser thermal annealing with one and more pulses - researchr publication authors

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M. Hackenberg, M. Rommel, M. Rumler, J. Lorenz, P. Pichler, K. Huet, R. Negru, G. Fisicaro, A. La Magna, N. Taleb, M. Quillec. Melt depth and time variations during pulsed laser thermal annealing with one and more pulses. In Proceedings of the European Solid-State Device Research Conference, ESSDERC 2013, Bucharest, Romania, September 16-20, 2013. pages 214-217, IEEE, 2013. [doi]

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