Melt depth and time variations during pulsed laser thermal annealing with one and more pulses

M. Hackenberg, M. Rommel, M. Rumler, J. Lorenz, P. Pichler, K. Huet, R. Negru, G. Fisicaro, A. La Magna, N. Taleb, M. Quillec. Melt depth and time variations during pulsed laser thermal annealing with one and more pulses. In Proceedings of the European Solid-State Device Research Conference, ESSDERC 2013, Bucharest, Romania, September 16-20, 2013. pages 214-217, IEEE, 2013. [doi]

Abstract

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