Susan Hackwood. Robotics In Microelectronics Manufacturing. In IEEE International Workshop on Intelligent Robots and Systems '88, Proceedings. IROS 1988, Tokyo, Japan, October 31 - November 2, 1988. pages 27-33, IEEE, 1988. [doi]
@inproceedings{Hackwood88,
title = {Robotics In Microelectronics Manufacturing},
author = {Susan Hackwood},
year = {1988},
doi = {10.1109/IROS.1988.592397},
url = {https://doi.org/10.1109/IROS.1988.592397},
researchr = {https://researchr.org/publication/Hackwood88},
cites = {0},
citedby = {0},
pages = {27-33},
booktitle = {IEEE International Workshop on Intelligent Robots and Systems '88, Proceedings. IROS 1988, Tokyo, Japan, October 31 - November 2, 1988},
publisher = {IEEE},
}